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2001 6th International Symposium on Plasma- And Process-Induced Damage: May 13-15, 2001, Monterey, California, USA (IEEE Conference Proceedings) (Hardcover)
By
Manfred Engelhardt
(Other)
$140.00
Email or call for price
Product Details
ISBN:
9780965157759
ISBN-10:
096515775X
Publisher:
Northern California Chapter of the American V
Publication Date:
January 1st, 2001
Pages:
5
Language:
English
Series:
IEEE Conference Proceedings
Categories
Electronics - Semiconductors